AIST>Network Database System for Thermophysical Property Data

Network Database System for Thermophysical Property Data is developed and run by AIST, and is available for free. Thermophysical properties data (ex. Thermal conductivity, thermal diffusivity, heat capacity, density, surface tension and vapor pressure) for liquid, solid and melts are stored in this database.

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More than 11,800 property data (including mechanical and optical properties) for about 3,600 materials are available for free. Please access our database browsing system on the web, "TPDS-web" via links on the right panel of this page.

Thermophysical properties of ITO thin films (Electrical conductivity, Thermal conductivity, Thermal diffusivity)

1. ITO_Pc coated with Mo on fused silica substrate
   1.1. ITO coated with Mo on fused silica substrate, Grade1 :Electrical conductivity, Thermal conductivity, and Thermal diffusivity

Indium tin oxide (ITO) is a most popular transparent conductive oxide (TCO), and is involved in smart phone as one of componets of touch panel. Thermophysical property of ITO is significantly importnat for thermal design and therma management. ITO thin films were deposited on the fused silica substrate by means of magnetron sputtering using In2O3 and SnO2 ceramics targets. The data shows properties changes dependent on process conditions such as sputtering gas flow rate. Electrical characters were measured by four-probe method and thermophysical property was measured by pulsed light heaing thermoreflectance method.

Related terms: transparent conductive oxide, electronical devices

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